Material Assessment

Characterization:

Galaxy Compound Semiconductor, Inc. employs a comprehensive set of materials characterization tools to ensure full conformity of product supplied. All assessment is managed according to ISO9001:2008 ANSI/ISO/ASQ Q9001-2008 certified quality control systems.

Structure
Surface and Flat OrientationPhilips Laue Orientation System
Rigaku 2991F2 Dual Station X-ray Diffractometer
Defect DensityEtching and microscopic inspection

 
Bulk Properties
Carrier concentrationHewlett Packard Hall Effect Test System
MobilityHewlett Packard Hall Effect Test System
ResistivityHewlett Packard Hall Effect Test System
Wavelength TransparencyPerkin Elmer Fourier Transform Infrared Spectrometer

 
Dimensional Control
Flat lengthsMitutoyo Optical Comparator
DiameterAs Above
Edge ProfileAs Above
ThicknessMitutoyo Calipers and Micrometers
Keyence GT2-A12K Digital Contact Sensor
Keyence LK-G10 CCD Laser Displacement Sensor
Flatness
(TTV, TIR, Bow, Warp)
Wyko 600D Interferometer
Tropel FM100 Flatmaster

 
Polish Quality
Surface MorphologyNikon Optiphot 66 Nomarski Microscopes
Haze and ParticulatesKLA-Tencor Surfscan 6220
Collimated Light Inspection
'Epi-readiness'MBE via IQE Group Growth Testing Service

Metrology is a critical aspect of product conformity. As a member of IQE plc, Galaxy's characterization portfolio additionally extends to the regular use of an extensive group metrology service which is comprised of many state-of-the-art wafer assessment tools. These include advanced surface analysis by atomic force microscopy (Veeco Digital Instruments D13100) and 3D surface profilometry (Taylor Hobson Talysurf CCI 3000). Further electrical measurements are made using contactless sheet resistance (Lehighton LEI 1500RS). Layer thickness determination can be made by spectroscopic ellipsometry and infrared microscopy (Film Expert MKS 2140). Combined with our own in-house range of material assessment tools, Galaxy is able to deliver the highest quality GaSb and InSb substrates.